Hitachi Chemical Co. America, Ltd.

CMP Slurry

for STI

Hitachi Chemical is a leading company of C e O 2 slurry for STI. "GPX" is excellent for polishing and it is suitable for finer patterns.

for Metals

"GPX" has two types: HS-C series for Cu and HS-T series for barrier metals. The polishing performance is controllable for various processes and devices.